Diffusion Furnace Configurator

Customer Information

Address

System Info

Cyclone, HT/LT, etc.?
Z2/Z4, Axcess, Manual?
Right or Left?
Semy, ICCI, Eurotherm ?

Tube Level Info

Process Type
(Top)
(Bottom)

Maximum Temp.
(Top)
(Bottom)

Process Temp.
(Top)
(Bottom)

Process Tube Size
(Top)
(Bottom)

Process Tube Material
(Top)
(Bottom)

Paddle Material & Type
(Top)
(Bottom)

Paddle Material & Type
(Top)
(Bottom)

Desired Wafer Throughput
(Top)
(Bottom)

Product Boat Type
(Top)
(Bottom)

No. Slots / Product Boat
(Top)
(Bottom)

Dummy Boat Type
(Top)
(Bottom)

No. Slots / Dummy boat
(Top)
(Bottom)

Liquid Source / Bubbler
(Top)
(Bottom)

DI Steam Generator
(Top)
(Bottom)

Torch
(Top)
(Bottom)

Pumping System
(Top)
(Bottom)

Flanges
(Top)
(Bottom)

Non-Heated Foreline
(Top)
(Bottom)

Heated Foreline
(Top)
(Bottom)

UPS
(Top)
(Bottom)

Protec (for SIC)
(Top)
(Bottom)

Facility Requirements

Power

Facility Connection Location:

Special Items